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Proceedings Paper

Polymer micro-molding of femtosecond laser micromachined substrates
Author(s): Marco Matteucci; Frédéric Madani-Grasset; Yves Bellouard; Dawn Vitek; Jeff Squier
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Paper Abstract

Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also particularly interesting for examining high-aspect ratio laser-machined structures fabricated in glass material. Thanks to this technique, surfaces not accessible with common imaging techniques can be observed on their molded negative structure with very high fidelity. As an illustration, we issue the use of the PDMS molding technique to analyze the quality of high aspect ratio holes and channels structures. Furthermore, we show preliminary results on the molding of a novel type of complex structures formed in glass using temporal and spatial beam shaping.

Paper Details

Date Published: 11 February 2011
PDF: 8 pages
Proc. SPIE 7925, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI, 79250X (11 February 2011); doi: 10.1117/12.886305
Show Author Affiliations
Marco Matteucci, Technische Univ. Eindhoven (Netherlands)
Frédéric Madani-Grasset, Technische Univ. Eindhoven (Netherlands)
Yves Bellouard, Technische Univ. Eindhoven (Netherlands)
Dawn Vitek, Colorado School of Mines (United States)
Jeff Squier, Colorado School of Mines (United States)

Published in SPIE Proceedings Vol. 7925:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI
Alexander Heisterkamp; Joseph Neev; Stefan Nolte, Editor(s)

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