
Proceedings Paper
Calibration and compensation of dual sensor system used in ultra precision diameter and form measuring instrumentFormat | Member Price | Non-Member Price |
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Paper Abstract
In order to improve the accuracy of an instrument by reducing or correcting the error of a sensor system, a calibration
device which can be used to trace the laser wavelength is used to calibrate the static and dynamic characteristics of dual
sensor system. Based on the accurate calibration data of the sensor, the nonlinearity error and the coherence error are
corrected and compensated using least-square approximation model and interpolation method. Test results indicate that
the nonlinearity of each sensor can be within 0.15% in the range of ±10μm and the incoherence is less than 0.2 % in the
range of ±5μm after corrected. Meanwhile, the cause and effect of a misalignment error between dual sensors are
analyzed.
Paper Details
Date Published: 31 December 2010
PDF: 6 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75445H (31 December 2010); doi: 10.1117/12.885462
Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)
PDF: 6 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75445H (31 December 2010); doi: 10.1117/12.885462
Show Author Affiliations
Wei Zhan, National Institute of Metrology (China)
Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)
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