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Proceedings Paper

Detection of positional precision of NC motorized stage based on photoelectric autocollimator
Author(s): Bixi Yan; Qimeng Tan; Naiguang Lv
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Paper Abstract

This paper presents a photoelectric autocollimator, which consists of an optical autocollimator and an area CCD and is calibrated using a dual-frequency laser interferometer HP5528A. The positional precision of a NC motorized stage is detected automatically and quickly by applying the photoelectric autocollimator calibrated and an optical polyhedron to finish the error compensation of the stage. According to GB/T 17421.2-2000, when the polyhedron and the stage both revolve with the same axis, the positional error of the stage is measured by the photoelectric autocollimator. Experimental results show that an angle can be measured by the photoelectric autocollimator whose standard deviation is less than 0.5" and the calculated position accuracy agrees with the specification of the stage.

Paper Details

Date Published: 31 December 2010
PDF: 7 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75445J (31 December 2010); doi: 10.1117/12.885408
Show Author Affiliations
Bixi Yan, Beijing Information Science and Technology Univ. (China)
Qimeng Tan, Beijing Univ. of Posts and Telecommunications (China)
Naiguang Lv, Beijing Information Science and Technology Univ. (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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