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Proceedings Paper

Size and mass loading effect on quality factor of single-crystal silicon cantilever in atmosphere
Author(s): Yong Liu; Gang Zhao; Yu-hang Chen; Jia-ru Chu
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Paper Abstract

For the single silicon cantilevers with low kinetic Reynolds numbers from 0.06 to 0.17, a modification of the existing approximate model for air damping analysis is presented. The mass added at the end is found to improve the quality factor of a cantilever in atmosphere. Silica gel is added at the end of the cantilever, as the loading mass. For a mass-loaded cantilever of 465x10x0.8 μm3, the quality factor is improved from 7.25 to 19.07, according to the loading mass of 21.79 ng. However, the frequency of the cantilever declines from 5.54 kHz to 1.68 kHz, resulting in a worse force detection resolution at the end.

Paper Details

Date Published: 28 December 2010
PDF: 6 pages
Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754462 (28 December 2010); doi: 10.1117/12.885304
Show Author Affiliations
Yong Liu, Univ. of Science and Technology of China (China)
Gang Zhao, Univ. of Science and Technology of China (China)
Yu-hang Chen, Univ. of Science and Technology of China (China)
Jia-ru Chu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7544:
Sixth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Xianfang Wen, Editor(s)

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