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Proceedings Paper

Optical attachment for transformation of output beam of excimer laser
Author(s): Alexander Zhevlakov; Egor Gavrilov; Sergey Kascheev; Veli Kujanpaa; Timo Savinainen
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Paper Abstract

The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 x 20 mm and equal divergence of 5 x 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.

Paper Details

Date Published: 22 March 2011
PDF: 6 pages
Proc. SPIE 7822, Laser Optics 2010, 78220C (22 March 2011); doi: 10.1117/12.885210
Show Author Affiliations
Alexander Zhevlakov, S.I. Vavilov State Optical Institute (Russian Federation)
Egor Gavrilov, S.I. Vavilov State Optical Institute (Russian Federation)
Sergey Kascheev, S.I. Vavilov State Optical Institute (Russian Federation)
Veli Kujanpaa, Lappeenranta Univ. of Technology (Finland)
Timo Savinainen, VTT Industrial Systems (Finland)

Published in SPIE Proceedings Vol. 7822:
Laser Optics 2010
Nikolay N. Rosanov; Vladimir Yu. Venediktov, Editor(s)

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