
Proceedings Paper
Thermal energy loss mechanisms in micro- to nano-scale devicesFormat | Member Price | Non-Member Price |
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Paper Abstract
In micro- and nano-scale resonators, a key performance metric is the quality factor (Q), which is the ratio of
stored mechanical energy to the energy dissipated. In well-optimized designs, Q is limited by thermal physics
and specific energy loss mechanisms including thermoelastic, Akhieser, and Landau-Rumer damping. The
relative importance of each effect depends on the time and length scales dominating the device. Most published
analyses focus on special regimes where only one mechanism dominates, though real devices may operate in
regimes that are not the limiting case. This paper presents thermal damping across the range of frequency and
length scales. Data on acoustic loss is compared with theory.
Paper Details
Date Published: 13 May 2011
PDF: 14 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311C (13 May 2011); doi: 10.1117/12.885130
Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)
PDF: 14 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311C (13 May 2011); doi: 10.1117/12.885130
Show Author Affiliations
A. E. Duwel, The Charles Stark Draper Lab. (United States)
Jeff Lozow, The Charles Stark Draper Lab. (United States)
Christopher J. Fisher, The Charles Stark Draper Lab. (United States)
Jeff Lozow, The Charles Stark Draper Lab. (United States)
Christopher J. Fisher, The Charles Stark Draper Lab. (United States)
Terese Phillips, The Charles Stark Draper Lab. (United States)
Roy H. Olsson, Sandia National Labs. (United States)
Marc Weinberg, The Charles Stark Draper Lab. (United States)
Roy H. Olsson, Sandia National Labs. (United States)
Marc Weinberg, The Charles Stark Draper Lab. (United States)
Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)
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