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Proceedings Paper

A speckle-based CMOS sensor array for arbitrary surface movement detection
Author(s): Chao Wang; Steve Tanner; Pierre-André Farine
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Paper Abstract

The paper presents a CMOS sensor array for the detection of speckle movements, for applications requiring accurate movement tracking of arbitrary surfaces. The array is made of eight sensors incorporating each a spatial comb filter with a pitch of 2.8μm so as to be direction-sensitive to the movement of speckles with corresponding direction and spatial frequency, defined by the optical geometry of the system. The circuit is used with an array of micro-lenses placed between the sensor and the laser-illuminated surface. With speckle statistics (contrast, size) being independent on the surface properties, the detection works on virtually any surface. The system is operated at a sampling frequency of 64kHz. Integrated into a 180nm CMOS process, the circuit active area occupies 1.9mm2 and consumes 290μW at full speed, allowing a maximal stable tracking speed of the surface of 0.25 m/s and a tracking accuracy of about 5μm.

Paper Details

Date Published: 31 May 2011
PDF: 12 pages
Proc. SPIE 8069, Integrated Photonics: Materials, Devices, and Applications, 80690Z (31 May 2011); doi: 10.1117/12.884798
Show Author Affiliations
Chao Wang, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Steve Tanner, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Pierre-André Farine, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 8069:
Integrated Photonics: Materials, Devices, and Applications
Ali Serpengüzel; Giancarlo Cesare Righini; Alfred Leipertz, Editor(s)

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