
Proceedings Paper
Energy dissipation in micromechanical resonatorsFormat | Member Price | Non-Member Price |
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Paper Abstract
Recent years have witnessed breakthrough researches in micro- and nano-mechanical resonators with small dissipation.
Nano-precision micromachining has enabled the realization of integrated micromechanical resonators with record high Q
and high frequency, creating new research horizons. Not too long ago, there was a perception in the MEMS community
that the maximum f.Q product of a microresonator is limited to a frequency-independent constant determined by the
material properties of the resonator. In this paper, the contribution of phonon interactions in determining the upper limit
of f.Q product in micromechanical resonators will be discussed and shown that after certain frequency, the f.Q product is
no longer constant but a linear function of frequency. This makes it possible to reach very high Qs in GHz micro- and
nano-mechanical resonators and filters. Contributions of other dissipation mechanisms such as thermoelastic damping
and support loss in the quality factor of a microresonator will be discussed as well.
Paper Details
Date Published: 13 May 2011
PDF: 13 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803119 (13 May 2011); doi: 10.1117/12.884731
Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)
PDF: 13 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803119 (13 May 2011); doi: 10.1117/12.884731
Show Author Affiliations
Farrokh Ayazi, Georgia Institute of Technology (United States)
Logan Sorenson, Georgia Institute of Technology (United States)
Logan Sorenson, Georgia Institute of Technology (United States)
Roozbeh Tabrizian, Georgia Institute of Technology (United States)
Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)
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