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Proceedings Paper

Direct-write scanning probe lithography: towards a desktop fab
Author(s): Louise R. Giam; Andrew J. Senesi; Xing Liao; Lu Shin Wong; Jinan Chai; Daniel J. Eichelsdoerfer; Wooyoung Shim; Boris Rasin; Shu He; Chad A. Mirkin
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Paper Abstract

Massively parallel scanning-probe based methods have been used to address the challenges of nanometer to millimeter scale printing for a variety of materials and mark a step towards the realization of a "desktop fab." Such tools enable simple, flexible, high-throughput, and low-cost nano- and microscale patterning, which allow researchers to rapidly synthesize and study systems ranging from nanoparticle synthesis to biological processes. We have developed a novel scanning probe-based cantilever-free printing method termed polymer pen lithography (PPL), which uses an array of elastomeric tips to transfer materials (e.g. alkanethiols, proteins, polymers) in a direct-write manner onto a variety of surfaces. This technique takes the best attributes of dip-pen nanolithography (DPN) and eliminates many of the disadvantages of contact printing. Various related techniques such as beam pen lithography (BPL), scanning probe block copolymer lithography (SPBCL), and hard-tip, soft spring lithography (HSL) are also discussed.

Paper Details

Date Published: 13 May 2011
PDF: 7 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803103 (13 May 2011); doi: 10.1117/12.884665
Show Author Affiliations
Louise R. Giam, Northwestern Univ. (United States)
Andrew J. Senesi, Northwestern Univ. (United States)
Xing Liao, Northwestern Univ. (United States)
Lu Shin Wong, Northwestern Univ. (United States)
Jinan Chai, Northwestern Univ. (United States)
Daniel J. Eichelsdoerfer, Northwestern Univ. (United States)
Wooyoung Shim, Northwestern Univ. (United States)
Boris Rasin, Northwestern Univ. (United States)
Shu He, Northwestern Univ. (United States)
Chad A. Mirkin, Northwestern Univ. (United States)

Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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