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Proceedings Paper

Development of nanostructured protective "sight glasses" for IR gas sensors
Author(s): René Bergmann; Zachary James Davis; Michael Stenbæk Schmidt; Sønnik Clausen; Anja Boisen; Jens Møller Jensen; Rainer Buchner; Thomine Stolberg-Rohr; Mogens Havsteen Jakobsen
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Paper Abstract

In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.

Paper Details

Date Published: 20 May 2011
PDF: 13 pages
Proc. SPIE 8016, Window and Dome Technologies and Materials XII, 80160S (20 May 2011); doi: 10.1117/12.883921
Show Author Affiliations
René Bergmann, Technical Univ. of Denmark (Denmark)
Zachary James Davis, Technical Univ. of Denmark (Denmark)
Michael Stenbæk Schmidt, Technical Univ. of Denmark (Denmark)
Sønnik Clausen, Technical Univ. of Denmark (Denmark)
Anja Boisen, Technical Univ. of Denmark (Denmark)
Jens Møller Jensen, Danfoss IXA A/S (Denmark)
Rainer Buchner, Danfoss IXA A/S (Denmark)
Thomine Stolberg-Rohr, Danfoss IXA A/S (Denmark)
Mogens Havsteen Jakobsen, Technical Univ. of Denmark (Denmark)

Published in SPIE Proceedings Vol. 8016:
Window and Dome Technologies and Materials XII
Randal W. Tustison, Editor(s)

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