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Proceedings Paper

A 256-pixel pyroelectric linear array with new black coating
Author(s): Volkmar Norkus; Marco Schossig; Gerald Gerlach; Reinhard Köhler
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Paper Abstract

This paper gives a survey of both the design and essential properties of newly developed pyroelectric linear arrays made on the basis of lithium tantalate (LiTaO3). There are up to 256 pixels with a minimum pitch of 50 μm. The detector is a hybrid arrangement of pyroelectric detector chip and 0.8 μm CMOS read-out circuit in a hermetic metal housing. Thanks to the development of a new black coating technology the thermal resolution and the homogeneity of the spectral responsivity have been permanently improved. The absorption layer consists of a columnar NiCr thin film. It is deposited using a special GLAD technology in high vacuum. The band absorption coefficient in the wavelength range 1...15 μm is about 0.9 for a layer with a thickness of about 1 μm. The NiCr absorption layer has very low thermal mass and high temperature stability. It can be patterned by lift-off technology. The measurement results demonstrate the excellent homogeneity of the spectral responsivity and the improvement of the signal-to-noise ratio of the linear arrays.

Paper Details

Date Published: 21 May 2011
PDF: 8 pages
Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 80123V (21 May 2011); doi: 10.1117/12.883107
Show Author Affiliations
Volkmar Norkus, Technische Univ. Dresden (Germany)
DIAS Infrared GmbH (Germany)
Marco Schossig, Technische Univ. Dresden (Germany)
Gerald Gerlach, Technische Univ. Dresden (Germany)
Reinhard Köhler, DIAS Infrared GmbH (Germany)

Published in SPIE Proceedings Vol. 8012:
Infrared Technology and Applications XXXVII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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