The paper focuses on the utilization of nanopositioning and nanomeasuring machines as a three dimensional coordinate measuring machine by means of the international harmonized communication protocol Inspection plus plus for Dimensional Measurement Equipment (abbreviated I++DME). I++DME was designed 1999 to enable the interoperability of different measuring hardware, like coordinate measuring machines, form tester, camshaft or crankshaft measuring machines, with a priori unknown third party controlling and analyzing software. Our recent work was focused on the implementation of a modular, standard conform command interpreter server for the Inspection plus plus protocol. This communication protocol enables the application of I++DME compliant graphical controlling software, which is easy to operate and less error prone than the currently used textural programming via MathWorks MATLab. The function and architecture of the I++DME command interpreter is discussed and the principle of operation is demonstrated by means of an example controlling a nanopositioning and nanomeasuring machine with Hexagon Metrology's controlling and analyzing software QUINDOS 7 via the I++DME command interpreter server.

Date Published: 13 May 2011
PDF: 10 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80312G (13 May 2011); doi: 10.1117/12.882822

Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)