
Proceedings Paper
Efficient femtosecond laser surface patterning using high dielectric constant particles with small size parameterFormat | Member Price | Non-Member Price |
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Paper Abstract
We present results on near-field ablation using Mie resonance high dielectric constant particles with small size parameter
for establishing a new downsizing technique for nanopatterning. In this article, we first describe a comparative study of
near-field properties on substrates using metallic and dielectric nanoparticle. The results indicate that combination of
particle and substrate for efficient localized near-field nano-processing is important for selecting either metallic or
dielectric particle. We then demonstrate nanoablation using a Mie resonance high dielectric constant small particle.
Theoretical calculations clarified that the maximal enhancement factor and spot diameter close to the smallest size are
obtainable on both low-refractive-index (SiO2) and high-refractive-index (Si) substrates using a 200 nm Mie resonance
dielectric particle (n~2.7) at magnetic quadrupole mode with 400 nm excitation wavelength. Experimental results with
200 nm amorphous TiO2 particles (n=2.66+0.024i) by 400 nm femtosecond laser irradiation verified that clear circular
nanoholes with about 100 nm in diameter were fabricated on both substrates even with laser fluence lower than a half
ablation threshold of the bare substrates. As for nanopatterning with two-dimensionally arrayed 200 nm amorphous TiO2particles, cohesion of nanoholes was observed in high laser fluence regime due to inter-particle near-field interaction.
Paper Details
Date Published: 15 November 2010
PDF: 9 pages
Proc. SPIE 7751, XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 77511V (15 November 2010); doi: 10.1117/12.881321
Published in SPIE Proceedings Vol. 7751:
XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Tanja Dreischuh; Petar A. Atanasov; Nikola V. Sabotinov, Editor(s)
PDF: 9 pages
Proc. SPIE 7751, XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 77511V (15 November 2010); doi: 10.1117/12.881321
Show Author Affiliations
Published in SPIE Proceedings Vol. 7751:
XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Tanja Dreischuh; Petar A. Atanasov; Nikola V. Sabotinov, Editor(s)
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