
Proceedings Paper
Development and characterization of carbon nanotube processes for NRAM technologyFormat | Member Price | Non-Member Price |
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Paper Abstract
NRAM technology, a non-volatile memory based on the use of carbon nanotubes, overcomes the limitations of other
memory technology types (including traditional Flash), for sub-40nm nodes, and is currently developed in manufacturing
fabs.
The NRAM technology process flow involves the deposition of a film of carbon nanotubes onto silicon wafers at several
of the critical layers (using spin coating techniques).
In this paper, we present the key steps of the development and characterization of carbon nanotube processes applied to
NRAM technology, focusing on specific deposition techniques, thickness control, and defectivity.
Paper Details
Date Published: 4 April 2011
PDF: 7 pages
Proc. SPIE 7970, Alternative Lithographic Technologies III, 797017 (4 April 2011); doi: 10.1117/12.879142
Published in SPIE Proceedings Vol. 7970:
Alternative Lithographic Technologies III
Daniel J. C. Herr, Editor(s)
PDF: 7 pages
Proc. SPIE 7970, Alternative Lithographic Technologies III, 797017 (4 April 2011); doi: 10.1117/12.879142
Show Author Affiliations
Gilles Amblard, Nantero, Inc. (United States)
Published in SPIE Proceedings Vol. 7970:
Alternative Lithographic Technologies III
Daniel J. C. Herr, Editor(s)
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