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Proceedings Paper

An improved focus control mirror using SU-8 wafer bonding process
Author(s): Mohammad J. Moghimi; B. Jeffery Lutzenberger; Kyle Oliver; Steven Gates; Xiaohu Xue; Brant Kaylor; David L. Dickensheets
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Paper Abstract

We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.

Paper Details

Date Published: 14 February 2011
PDF: 8 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793005 (14 February 2011); doi: 10.1117/12.876672
Show Author Affiliations
Mohammad J. Moghimi, Montana State Univ. (United States)
B. Jeffery Lutzenberger, Bridger Photonics, Inc. (United States)
Kyle Oliver, Montana State Univ. (United States)
Steven Gates, Montana State Univ. (United States)
Xiaohu Xue, Montana State Univ. (United States)
Brant Kaylor, Bridger Photonics, Inc. (United States)
David L. Dickensheets, Montana State Univ. (United States)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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