
Proceedings Paper
Characterization and annealing of high-stroke monolithic gold MEMS deformable mirror for adaptive opticsFormat | Member Price | Non-Member Price |
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Paper Abstract
Adaptive optics for the next generation of extremely large telescopes (30 - 50 meter diameter primary mirrors) requires
high-stroke (10 microns), high-order (100x100) deformable mirrors at lower-cost than current technology. Lowering the
cost while improving the performance of deformable mirrors is possible using Micro-Electro-Mechanical Systems
(MEMS) technology. In this paper the fabrication and testing of an array of high-stroke gold MEMS X-beam actuators
attached to a continuous gold facesheet will be described. Both the actuator and the facesheet were fabricated
monolithically in gold plated onto a thermally matched ceramic-glass substrate (WMS-15) using a high-aspect ratio
fabrication process.
Continuous facesheets that are deformed due to stress gradients have been annealed at high temperature and for an
extended amount of time. The facesheet was flattened to the point where features such as etch holes and support post
topography were easily distinguishable. Initial root-mean-square (RMS) topography at center of facesheet attached to a
16x16 X-beam actuator array with 1mm pitch was measured to be ~13.8μm. After annealing, the surface topography
was measured to be ~1.0μm.
Paper Details
Date Published: 14 February 2011
PDF: 7 pages
Proc. SPIE 7931, MEMS Adaptive Optics V, 79310A (14 February 2011); doi: 10.1117/12.876530
Published in SPIE Proceedings Vol. 7931:
MEMS Adaptive Optics V
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)
PDF: 7 pages
Proc. SPIE 7931, MEMS Adaptive Optics V, 79310A (14 February 2011); doi: 10.1117/12.876530
Show Author Affiliations
Bautista Fernández, Univ. of California, Santa Cruz (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)
Published in SPIE Proceedings Vol. 7931:
MEMS Adaptive Optics V
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)
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