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Proceedings Paper

Real-time ultrafast optical interferometry of NEMS operating in fluidic environment
Author(s): Oleksiy Svitelskiy; Vince Sauer; Ning Liu; Kar-Mun Cheng; Eric Finley; Mark R. Freeman; Wayne K. Hiebert
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Paper Abstract

Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N2, CO2), and liquid CO2. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit.

Paper Details

Date Published: 14 February 2011
PDF: 8 pages
Proc. SPIE 7929, Microfluidics, BioMEMS, and Medical Microsystems IX, 79290V (14 February 2011); doi: 10.1117/12.875752
Show Author Affiliations
Oleksiy Svitelskiy, National Institute for Nanotechnology (Canada)
Univ. of Alberta (Canada)
Vince Sauer, National Institute for Nanotechnology (Canada)
Univ. of Alberta (Canada)
Ning Liu, Univ. of Alberta (Canada)
Kar-Mun Cheng, National Institute for Nanotechnology (Canada)
Eric Finley, National Institute for Nanotechnology (Canada)
Mark R. Freeman, National Institute for Nanotechnology (Canada)
Univ. of Alberta (Canada)
Wayne K. Hiebert, National Institute for Nanotechnology (Canada)

Published in SPIE Proceedings Vol. 7929:
Microfluidics, BioMEMS, and Medical Microsystems IX
Holger Becker; Bonnie L. Gray, Editor(s)

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