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Proceedings Paper

Microfabricated mirrors for space applications
Author(s): Dara Bayat; Caglar Ataman; Benedikt Guldimann; Sébastien Lani; Wilfried Noell; Nico de Rooij
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Paper Abstract

We report on the advances towards the design and fabrication of a system consisting of two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection angle of each of the actuators will be reviewed and compared.

Paper Details

Date Published: 14 February 2011
PDF: 9 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300W (14 February 2011); doi: 10.1117/12.875038
Show Author Affiliations
Dara Bayat, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Caglar Ataman, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Benedikt Guldimann, European Space Research and Technology Ctr. (Netherlands)
Sébastien Lani, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Nico de Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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