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Proceedings Paper

Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Author(s): Jan Grahmann; Thomas Graßhoff; Holger Conrad; Thilo Sandner; Harald Schenk
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Paper Abstract

We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 μm thick p-doped layer of NA ≈ 1017 cm-3 into the lowly p-doped SOI device layer of NA ≈ 1015 cm-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.

Paper Details

Date Published: 14 February 2011
PDF: 8 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300V (14 February 2011); doi: 10.1117/12.874979
Show Author Affiliations
Jan Grahmann, Fraunhofer Institute for Photonic Microsystems (Germany)
Thomas Graßhoff, Fraunhofer Institute for Photonic Microsystems (Germany)
Holger Conrad, Fraunhofer Institute for Photonic Microsystems (Germany)
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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