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Proceedings Paper

Development of a polarization resolved mid-IR near-field microscope
Author(s): Zohreh Sedaghat; Aurelien Bruyant; Michel Kazan; Julien Vaillant; Sylvain Blaize; Névine Rochat; Nicolas Chevalier; Enric Garcia-Caurel; Pierre Morin; Pascal Royer
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Paper Abstract

We have developed a scattering-type microscope operating in the mid-IR range with a polarization analysis. The experimental development and the operation of the microscope are described. The optical system can provide for each pixel of the image a matrix similar to a Jones matrix. Examples of polarization resolved images obtained on a SiO2/Si surface grating with a tungsten probe are shown and a high optical resolution is clearly demonstrated through the imaging of submicron metallic lines.

Paper Details

Date Published: 1 March 2011
PDF: 6 pages
Proc. SPIE 7946, Photonic and Phononic Properties of Engineered Nanostructures, 79461N (1 March 2011); doi: 10.1117/12.874932
Show Author Affiliations
Zohreh Sedaghat, Univ. de Technologie Troyes (France)
Aurelien Bruyant, Univ. de Technologie Troyes (France)
Michel Kazan, American Univ. of Beyrouth (Lebanon)
Julien Vaillant, Univ. de Technologie Troyes (France)
Sylvain Blaize, Univ. de Technologie Troyes (France)
Névine Rochat, Commissariat à l'Énergie Atomique (France)
Nicolas Chevalier, Commissariat à l'Énergie Atomique (France)
Enric Garcia-Caurel, Lab. de Physique des Interfaces et Couches Minces (France)
Pierre Morin, ST-Microelectronics (France)
Pascal Royer, Univ. de Technologie Troyes (France)

Published in SPIE Proceedings Vol. 7946:
Photonic and Phononic Properties of Engineered Nanostructures
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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