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Proceedings Paper

Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer
Author(s): Yusuke Miura; Hideto Endo; Takuya Oshima; Masashi Ohkawa; Takashi Sato
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Paper Abstract

Our group has developed a silicon-based guided-wave optical accelerometer with a proof mass centered on a diaphragm. For this type of accelerometer, it is strongly suggested that sensitivity is related to waveguide position, diaphragm dimensions, and size and weight of proof mass. In this study, sensitivity dependences on waveguide position and diaphragm thickness were considered experimentally. Experimental results demonstrated that the highest sensitivity could be obtained for the waveguide at the diaphragm edge and is inversely proportional to the square of the diaphragm thickness.

Paper Details

Date Published: 17 January 2011
PDF: 6 pages
Proc. SPIE 7941, Integrated Optics: Devices, Materials, and Technologies XV, 79410P (17 January 2011); doi: 10.1117/12.873660
Show Author Affiliations
Yusuke Miura, Niigata Univ. (Japan)
Hideto Endo, Niigata Univ. (Japan)
Takuya Oshima, Niigata Univ. (Japan)
Masashi Ohkawa, Niigata Univ. (Japan)
Takashi Sato, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 7941:
Integrated Optics: Devices, Materials, and Technologies XV
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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