
Proceedings Paper
Development of on-CMOS chip micro-photonic and MOEMS systemsFormat | Member Price | Non-Member Price |
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Paper Abstract
Advanced 3D CAD and optical simulation software were used to design first
iteration on-CMOS chip MOEMS micro-systems. A Si Avalanche-based LED
and an array of detectors interface laterally with a single arm canti-lever system,
all to be fabricated with CMOS technology. Silicon nitride wave-guides are
used as optical propagation channels offering losses of lower than 1dB.cm-1.
Micro-bending and multi-planing of the wave guiding is possible. Far-field
manipulation of the emitted channel radiation is possible. Mechanically
designed and sensor systems can be added by means of CMOS post processing
techniques. The emission level of the Si CMOS Av LEDs is 10+3 higher than
the detectivity of silicon p-i-n detectors, offering good dynamic range in
detection and data analyses. The mature processing characteristics of CMOS
technology offers high integration possibilities and low cost manufacturing of the
designed systems.
Paper Details
Date Published: 14 February 2011
PDF: 11 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300Z (14 February 2011); doi: 10.1117/12.873353
Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)
PDF: 11 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300Z (14 February 2011); doi: 10.1117/12.873353
Show Author Affiliations
Lukas W. Snyman, Tshwane Univ. of Technology (South Africa)
Timothy Okhai, Tshwane Univ. of Technology (South Africa)
Timothy Okhai, Tshwane Univ. of Technology (South Africa)
Tarik Bourouina, Groupe ESIEE (France)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)
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