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Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
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Paper Abstract

Resonantly driven oscillating MOEMS mirrors have many applications in the fields of optics, telecommunication and spectroscopy. Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a complex task, which can impede or retard incorporation of such MOEMS mirrors in large systems. For this we have developed compact modules comprising optical position sensing and driver electronics with closed loop control, which can ensure stable resonant operation of 1D and 2D micro-mirrors. In this contribution we present in much detail the position encoding and feedback scheme, and show very first experimental results with the novel 2D device.

Paper Details

Date Published: 14 February 2011
PDF: 10 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300S (14 February 2011); doi: 10.1117/12.873261
Show Author Affiliations
A. Tortschanoff, Carinthian Tech Research AG (Austria)
A. Frank, Carinthian Tech Research AG (Austria)
M. Wildenhain, Fraunhofer Institute for Photonic Microsystems (Germany)
H. S. Tetikol, Koç Univ. (Turkey)
T. Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
H. Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
A. Kenda, Carinthian Tech Research AG (Austria)

Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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