Share Email Print

Proceedings Paper

A non-contact measurement technique to measure micro-surface stress and obtain deformation profiles of the order of 1nm in microcantilever-based structures by single image optical diffraction method
Author(s): Arindam Phani
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A new method based on analysis of a single diffraction pattern is proposed to measure deflections in micro-cantilever (MC) based sensor probes, achieving typical deflection resolutions of 1nm and surface stress changes of 50μN/m. The proposed method employs a double MC structure where the deflection of one of the micro-cantilevers relative to the other due to surface stress changes results in a linear shift of intensity maxima of the Fraunhofer diffraction pattern of the transilluminated MC. Measurement of such shifts in the intensity maxima of a particular order along the length of the structure can be done to an accuracy of 0.01mm leading to the proposed sensitivity of deflection measurement in a typical microcantilever. This method can overcome the fundamental measurement sensitivity limit set by diffraction and pointing stability of laser beam in the widely used Optical Beam Deflection method (OBDM).

Paper Details

Date Published: 22 September 2010
PDF: 7 pages
Proc. SPIE 7750, Photonics North 2010, 77502C (22 September 2010); doi: 10.1117/12.872976
Show Author Affiliations
Arindam Phani, Indian Institute of Science (India)

Published in SPIE Proceedings Vol. 7750:
Photonics North 2010
Henry P. Schriemer; Rafael N. Kleiman, Editor(s)

© SPIE. Terms of Use
Back to Top