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Proceedings Paper

Integrated circuit layer image segmentation
Author(s): Giedrius Masalskis; Romas Petrauskas
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Paper Abstract

In this paper we present IC layer image segmentation techniques which are specifically created for precise metal layer feature extraction. During our research we used many samples of real-life de-processed IC metal layer images which were obtained using optical light microscope. We have created sequence of various image processing filters which provides segmentation results of good enough precision for our application. Filter sequences were fine tuned to provide best possible results depending on properties of IC manufacturing process and imaging technology. Proposed IC image segmentation filter sequences were experimentally tested and compared with conventional direct segmentation algorithms.

Paper Details

Date Published: 14 September 2010
PDF: 7 pages
Proc. SPIE 7745, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010, 774517 (14 September 2010); doi: 10.1117/12.872254
Show Author Affiliations
Giedrius Masalskis, Vilnius Gediminas Technical Univ. (Lithuania)
Romas Petrauskas, Vilnius Gediminas Technical Univ. (Lithuania)


Published in SPIE Proceedings Vol. 7745:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010
Ryszard S. Romaniuk, Editor(s)

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