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Proceedings Paper

Development of chipscale chalcogenide glass based infrared chemical sensors
Author(s): Juejun Hu; J. David Musgraves; Nathan Carlie; Bogdan Zdyrko; Igor Luzinov; Anu Agarwal; Kathleen Richardson; Lionel Kimerling
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Paper Abstract

In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.

Paper Details

Date Published: 24 January 2011
PDF: 10 pages
Proc. SPIE 7945, Quantum Sensing and Nanophotonic Devices VIII, 79452C (24 January 2011); doi: 10.1117/12.871399
Show Author Affiliations
Juejun Hu, Univ. of Delaware (United States)
J. David Musgraves, Clemson Univ. (United States)
Nathan Carlie, Clemson Univ. (United States)
Bogdan Zdyrko, Clemson Univ. (United States)
Igor Luzinov, Clemson Univ. (United States)
Anu Agarwal, Massachusetts Institute of Technology (United States)
Kathleen Richardson, Clemson Univ. (United States)
Lionel Kimerling, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 7945:
Quantum Sensing and Nanophotonic Devices VIII
Manijeh Razeghi; Rengarajan Sudharsanan; Gail J. Brown, Editor(s)

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