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Proceedings Paper

Multiwavelength non-incremental laser Doppler distance sensor with phase coding for vibration measurements
Author(s): P. Günther; T. Pfister; J. Czarske
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Paper Abstract

In this article we present a novel optical sensor allowing simultaneous measurements of axial displacement and tangential velocity of moving rough solid state objects. The laser Doppler distance sensor with phase coding (P-LDDS) features multiple interference fringe systems which are superposed slightly tilted. The axial displacement of fast laterally moving rough solid state surfaces as well as of purely axial moving objects is determined via phase evaluation. Within a measurement range of 200 μm, the measured maximum systematic displacement error at a laterally moving rough solid state object is 1.4 μm and the displacement resolution is 240 nm. In contrast to conventional measurement techniques, such as triangulation, the displacement uncertainty is independent of the lateral object velocity. This unique feature can be utilized for precise displacement and vibration measurements of high speed objects.

Paper Details

Date Published: 13 September 2010
PDF: 9 pages
Proc. SPIE 7387, Speckle 2010: Optical Metrology, 738708 (13 September 2010); doi: 10.1117/12.870756
Show Author Affiliations
P. Günther, Technische Univ. Dresden (Germany)
T. Pfister, Technische Univ. Dresden (Germany)
J. Czarske, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 7387:
Speckle 2010: Optical Metrology
Armando Albertazzi Goncalves Jr.; Guillermo H. Kaufmann, Editor(s)

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