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Proceedings Paper

Evaluation of the usage of a fiber optic low-coherence interferometer for surface profile measurements using speckles analysis
Author(s): Robert Schmitt; Guilherme Mallmann
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Paper Abstract

The low-coherence interferometry is already an established technique for the high-resolution characterization of surface profiles. Its application in many industrial areas is however partially limited due to undesired effects in the interference pattern caused by different surface's roughness and form properties. The appearance of speckles in rough surfaces or the batwing-effect in high-precision topographies are examples of undesired influences. Another important limiting factor is the size and robustness of the metrological set-ups. The measurement of small cavities or the integration in production machines are therefore still a challenge. In this work the application of a fiber-optical low-coherence interferometer for the characterization of different surface profiles, as well as miniaturized and / or hard accessible features is presented. Focus will be given on the measurement of optical "uncooperative" surfaces, as rough and / or curved surfaces, for example in small cavities, using the analysis of the speckle phenomena.

Paper Details

Date Published: 13 September 2010
PDF: 8 pages
Proc. SPIE 7387, Speckle 2010: Optical Metrology, 73870N (13 September 2010); doi: 10.1117/12.870754
Show Author Affiliations
Robert Schmitt, Fraunhofer Institute for Production Technology (Germany)
WZL, RWTH Aachen (Germany)
Guilherme Mallmann, Fraunhofer Institute for Production Technology (Germany)

Published in SPIE Proceedings Vol. 7387:
Speckle 2010: Optical Metrology
Armando Albertazzi Goncalves Jr.; Guillermo H. Kaufmann, Editor(s)

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