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Proceedings Paper

Off-axis low-coherence interferometry for surface topology measurement
Author(s): Yves Delacrétaz; Daniel Boss; Florian Lang; Christian Depeursinge
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Paper Abstract

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

Paper Details

Date Published: 13 September 2010
PDF: 9 pages
Proc. SPIE 7387, Speckle 2010: Optical Metrology, 738715 (13 September 2010); doi: 10.1117/12.870742
Show Author Affiliations
Yves Delacrétaz, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Daniel Boss, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Florian Lang, Ctr. Hospitalier Univ. Vaudois (Switzerland)
Christian Depeursinge, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 7387:
Speckle 2010: Optical Metrology
Armando Albertazzi Goncalves Jr.; Guillermo H. Kaufmann, Editor(s)

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