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Proceedings Paper

Off-axis reflection digital holographic microscopy for micron structure tomography measurement
Author(s): Guofeng Cheng; Zhuqing Jiang; Dayong Wang; Maoluan Ding; Huakun Cui
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Paper Abstract

The single wavelength off-axis reflection digital holographic microscopy (DHM) can be applied in micron optical tomography measurement through the pre-magnification method. The pre-magnifying surface profile of the object is imaged by the lens placed in front of the object to be measured, and then is recorded by the CCD camera. The Reconstructed image can be got through Fresnel Diffraction calculation, the 3D surface shape information of the object was shown after the phase filtering and unwrapping process to the reconstruction image. The result in this experiment proves that off-axis reflection digital holographic microscopy can be applied to actual measurement of micron object, to achieve the tomography without touching or breaking the object.

Paper Details

Date Published: 17 November 2010
PDF: 7 pages
Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78482E (17 November 2010); doi: 10.1117/12.870092
Show Author Affiliations
Guofeng Cheng, Beijing Univ. of Technology (China)
Zhuqing Jiang, Beijing Univ. of Technology (China)
Dayong Wang, Beijing Univ. of Technology (China)
Maoluan Ding, Beijing Univ. of Technology (China)
Huakun Cui, Beijing Univ. of Technology (China)

Published in SPIE Proceedings Vol. 7848:
Holography, Diffractive Optics, and Applications IV
Yunlong Sheng; Chongxiu Yu; Linsen Chen, Editor(s)

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