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Proceedings Paper

Investigation on femtosecond laser-assisted microfabrication in silica glasses
Author(s): Hewei Liu; Feng Chen; Qing Yang; Jinhai Si; Xun Hou
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Paper Abstract

Fabrication of microstructures embedded in silica glasses using a femtosecond (fs)-laser-assisted chemical etching technique is systematically studied in this work. By scanning the laser pulses inside samples followed by the treatment of 5%-diluted hydrofluoric (HF) acid, groups of straight channels are fabricated and the relationship between the etching rate and processing parameters, including laser power, scanning speed, scanning time and laser polarization, is demonstrated. Based on the optimization of these parameters, complicated microstructures such as channels, cavities and their combinations are manufactured. The work has great potential applications in microelectromechanical systems, biomedical detection and chemical analysis.

Paper Details

Date Published: 16 November 2010
PDF: 9 pages
Proc. SPIE 7843, High-Power Lasers and Applications V, 78430V (16 November 2010); doi: 10.1117/12.869845
Show Author Affiliations
Hewei Liu, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Jinhai Si, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 7843:
High-Power Lasers and Applications V
Upendra N. Singh; Dianyuan Fan; Jianquan Yao; Robert F. Walter, Editor(s)

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