Porous silicon has attracted a great deal of attention and research for biochemical sensing applications. In this study, we report a novel porous silicon based resonant grating filters as an optical sensor platform. A narrow bandwidth in the reflectance spectrum is shown of this porous silicon grating filters and this resonance dip shift obviously after little infiltration. This research also played a potential role for the extensive applications in all-silicon biosensor.

Date Published: 9 November 2010
PDF: 6 pages
Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 785308 (9 November 2010);

Published in SPIE Proceedings Vol. 7853:
Advanced Sensor Systems and Applications IV
Brian Culshaw; Yanbiao Liao; Anbo Wang; Xiaoyi Bao; Xudong Fan; Lin Zhang, Editor(s)