We present a miniature Fabry-Perot pressure sensor which is made of silica glass capillary tubing and two single mode fibers. The sensor has an inside diameter of 125 μm and outside diameter of 240 μm, and its sensitivity can be adjusted by controlling the sensor gauge length. The sensor has been tested for static pressure response, showing a sensitivity of 3.98 pm/kPa, a resolution of 0.1kPa, a linearity of 99.76% and a hysteresis of 0.12%, and capability of operation at temperatures up to 500°C. This sensor is immune to electromagnetic interference and has high-temperature capability, may be used in applications where high temperature and/or small size are important.

Date Published: 12 October 2010
PDF: 5 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765703 (12 October 2010); doi: 10.1117/12.867749

Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)