A novel micro-grating array for Shack Hartmann wavefront sensors is presented. This circular micro-grating array shows obvious advantage in matching circular aperture. It also provides a potential way of decreasing the expense of Shack Hartmann wavefront sensors for its easy design and manufacturing procedure. An implementation is shown together with experimental and measuring results. With this circular micro-grating array, a circular aperture can be matched by 100%, which can avoid the lost of useful information when testing and measuring, at the same time, the regular focal spots array will adapt to the common detectors which are always rectangular. In addition, another design and implementation of one dimensional micro-grating array is also presented by which a higher efficiency will be available.

Date Published: 11 October 2010
PDF: 5 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76567I (11 October 2010); doi: 10.1117/12.867501

Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)