
Proceedings Paper
Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processingFormat | Member Price | Non-Member Price |
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Paper Abstract
Zerodur material is considered as the ideal material in the high performance optic systems because of its excellent
thermal stability characteristics. This paper deals with the impacting factors on the zerodur material surface roughness
during atmospheric pressure plasma jet(APPJ) processing. At first, based on multiphase and multi-component in zerodur
material, the effect on the zerodur surface chemical components and surface roughness is studied when the element
contained Si is etched during the chemical machining process. The change of surface microcosmic topography is
observed, it is proved that the technology of atmospheric pressure plasma jet can modify the surface roughness of
zerodur material. Moreover, in consideration of the re-deposition phenomenon in the machining process, the composition
of the re-deposition are studied and the genesis of the re-deposition were analysed. Scanning Electron Microscopy
(SEM) with Energy Dispersive X-ray spectrometry (EDX) were utilized to obtain the elemental composition of the
sample powder residuum on zerodur surface. The relationship between substrate roughness and the process parameters is
established based on the experimental results. Experimental results indicate that it is beneficial to add certain amount O2
to modify the surface roughness of zerodur material. This finding provides an important basis for the improvement of
surface roughness in APPJ of zerodur material.
Paper Details
Date Published: 6 October 2010
PDF: 7 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552X (6 October 2010); doi: 10.1117/12.866683
Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)
PDF: 7 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552X (6 October 2010); doi: 10.1117/12.866683
Show Author Affiliations
H. L. Jin, Harbin Institute of Technology (China)
B. Wang, Harbin Institute of Technology (China)
B. Wang, Harbin Institute of Technology (China)
F. H. Zhang, Harbin Institute of Technology (China)
Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)
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