
Proceedings Paper
Finite element analysis for PZT actuated deformable polishing lapFormat | Member Price | Non-Member Price |
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Paper Abstract
In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the
surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using
PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT
actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed
deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of
deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this
paper, the rational of novel deformable polishing lap is introduced, and the calculation formula of PZT actuator
deformation is explored also. By using finite element method (FEM), the deforming capability of the novel deformable
polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. The results
of two type of PZT actuator arrangement are compared and analyzed. The results show that the novel deformable
polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.
Paper Details
Date Published: 6 October 2010
PDF: 6 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76551F (6 October 2010); doi: 10.1117/12.864657
Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)
PDF: 6 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76551F (6 October 2010); doi: 10.1117/12.864657
Show Author Affiliations
Ziqiang Hu, Yantai Univ. (China)
Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)
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