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Proceedings Paper

Large scale flash memory system (LSFMS) for photomask defect inspection machine
Author(s): Satoshi Yamamoto; Ravi Pai; Manish Ranade; Soumen Mondal; Sundeep Prabhu; Gen Kurosaki
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Paper Abstract

Concept of asynchronous DB defects inspection machine was contrived to the purpose of reducing the price which had large scale flash memory buffer. This memory buffer was located in between reference data rendering computer and scanner; also it was located in scanner and image computer. As first step to make the concept model real, an experimental system was built which had virtual scanner.

Paper Details

Date Published: 26 May 2010
PDF: 8 pages
Proc. SPIE 7748, Photomask and Next-Generation Lithography Mask Technology XVII, 77481D (26 May 2010); doi: 10.1117/12.864177
Show Author Affiliations
Satoshi Yamamoto, Agile Patch Solutions Inc. (Japan)
Ravi Pai, SoftJin Technologies Pvt. Ltd. (India)
Manish Ranade, SoftJin Technologies Pvt. Ltd. (India)
Soumen Mondal, SoftJin Technologies Pvt. Ltd. (India)
Sundeep Prabhu, SoftJin Technologies Pvt. Ltd. (India)
Gen Kurosaki, Selcon Technology Inc. (Japan)

Published in SPIE Proceedings Vol. 7748:
Photomask and Next-Generation Lithography Mask Technology XVII
Kunihiro Hosono, Editor(s)

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