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Proceedings Paper

Advances in modeling of scanning charged-particle-microscopy images
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Paper Abstract

Modeling artificial scanning electron microscope (SEM) and scanning ion microscope images has recently become important. This is because of the need to provide repeatable images with a priori determined parameters. Modeled artificial images are highly useful in the evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the NIST-developed artificial image generator was designed only to produce the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved version of the software was written in C++ programming language and is in the Public Domain. The current version of the software can generate arbitrary samples, any drift function, and many other features. This work describes scanning in charged-particle microscopes, which is applied both in the artificial image generator and the DCIC technique. As an example, the performance of the DCIC technique is demonstrated.

Paper Details

Date Published: 3 June 2010
PDF: 9 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77290Z (3 June 2010); doi: 10.1117/12.861064
Show Author Affiliations
Petr Cizmar, National Institute of Standards and Technology (United States)
András E. Vladár, National Institute of Standards and Technology (United States)
Michael T. Postek, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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