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Proceedings Paper

Micro-and nano-tomography at the GKSS Imaging Beamline at PETRA III
Author(s): A. Haibel; M. Ogurreck; F. Beckmann; T. Dose; F. Wilde; J. Herzen; M. Müller; A. Schreyer; V. Nazmov; M. Simon; A. Last; J. Mohr
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Paper Abstract

The unique beam characteristics of PETRA III at DESY promote novel applications for many scientific fields, including imaging applications. For tomography these are techniques like high-speed and in-situ measurements marked by highest density resolutions and spatial resolutions down to the nanometer range. Furthermore, the high coherence enables phase contrast applications in an exceptional way. Therefore, the Imaging Beamline IBL is equipped with two dedicated endstations, one for micro and one for nano tomography. In addition, a very flexible X-ray and light optics concept is implemented. The micro tomography endstation is designed for samples requiring (sub-) micrometer resolution. The technical specifications of the nano tomography endstation aim for a spatial resolution of below 100 nm. The nanometer resolution will be achieved by using different combinations of compound refractive lenses as X-ray optics. The overall setup is designed to be very flexible, which allows also the implementation of other optical elements as well as the application of different magnifying techniques.

Paper Details

Date Published: 20 September 2010
PDF: 8 pages
Proc. SPIE 7804, Developments in X-Ray Tomography VII, 78040B (20 September 2010); doi: 10.1117/12.860852
Show Author Affiliations
A. Haibel, GKSS-Forschungszentrum Geesthacht (Germany)
M. Ogurreck, GKSS-Forschungszentrum Geesthacht (Germany)
F. Beckmann, GKSS-Forschungszentrum Geesthacht (Germany)
T. Dose, GKSS-Forschungszentrum Geesthacht (Germany)
F. Wilde, GKSS-Forschungszentrum Geesthacht (Germany)
J. Herzen, GKSS-Forschungszentrum Geesthacht (Germany)
M. Müller, GKSS-Forschungszentrum Geesthacht (Germany)
A. Schreyer, GKSS-Forschungszentrum Geesthacht (Germany)
V. Nazmov, Karlsruher Institut für Technologie (Germany)
M. Simon, Karlsruher Institut für Technologie (Germany)
A. Last, Karlsruher Institut für Technologie (Germany)
J. Mohr, Karlsruher Institut für Technologie (Germany)

Published in SPIE Proceedings Vol. 7804:
Developments in X-Ray Tomography VII
Stuart R. Stock, Editor(s)

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