Proceedings Paper
Silicon nitride light pipes for image sensors| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known
as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of
photodiodes.
Paper Details
Date Published: 18 August 2010
PDF: 10 pages
Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800W (18 August 2010); doi: 10.1117/12.860777
Published in SPIE Proceedings Vol. 7780:
Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Eustace L. Dereniak; Randolph E. Longshore; Manijeh Razeghi; John P. Hartke; Ashok K. Sood; Paul D. LeVan, Editor(s)
PDF: 10 pages
Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800W (18 August 2010); doi: 10.1117/12.860777
Show Author Affiliations
Turgut Tut, Harvard Univ. (United States)
Peter Duane, Zena Technologies Inc. (United States)
Winnie N. Ye, Harvard Univ. (United States)
Peter Duane, Zena Technologies Inc. (United States)
Winnie N. Ye, Harvard Univ. (United States)
Munib Wober, Zena Technologies Inc. (United States)
Kenneth B. Crozier, Harvard Univ. (United States)
Kenneth B. Crozier, Harvard Univ. (United States)
Published in SPIE Proceedings Vol. 7780:
Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Eustace L. Dereniak; Randolph E. Longshore; Manijeh Razeghi; John P. Hartke; Ashok K. Sood; Paul D. LeVan, Editor(s)
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