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Proceedings Paper

Silicon nitride light pipes for image sensors
Author(s): Turgut Tut; Peter Duane; Winnie N. Ye; Munib Wober; Kenneth B. Crozier
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Paper Abstract

We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.

Paper Details

Date Published: 18 August 2010
PDF: 10 pages
Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800W (18 August 2010); doi: 10.1117/12.860777
Show Author Affiliations
Turgut Tut, Harvard Univ. (United States)
Peter Duane, Zena Technologies Inc. (United States)
Winnie N. Ye, Harvard Univ. (United States)
Munib Wober, Zena Technologies Inc. (United States)
Kenneth B. Crozier, Harvard Univ. (United States)

Published in SPIE Proceedings Vol. 7780:
Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon
Eustace L. Dereniak; Randolph E. Longshore; Manijeh Razeghi; John P. Hartke; Ashok K. Sood; Paul D. LeVan, Editor(s)

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