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Proceedings Paper

Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution
Author(s): Chyan-Chyi Wu; Chun-Yao Cheng; Zi-Yi Yang
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Paper Abstract

Grating interferometers overcome the diffraction limit of optical waves. They can provide nano-scale displacement resolution, and will have great potential for nano-metrology applications. The optical configurations of used grating interferometers are Michelson's type with different paths between the measurement beam and reference beam. Environmental disturbance can directly enter the measured signals and cannot be essentially slashed. Thus the accuracy of the used grating interferometers becomes dramatically worse. In this paper, a homodyne common-path grating interferometer is proposed, that can reduce the environmental disturbance at its lowest level. It has promising potential for nanotechnology applications. The measurement principle and experimental verifications are done in the work.

Paper Details

Date Published: 2 August 2010
PDF: 8 pages
Proc. SPIE 7791, Interferometry XV: Applications, 779105 (2 August 2010); doi: 10.1117/12.860513
Show Author Affiliations
Chyan-Chyi Wu, Tamkang Univ. (Taiwan)
Chun-Yao Cheng, Tamkang Univ. (Taiwan)
Zi-Yi Yang, Tamkang Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7791:
Interferometry XV: Applications
Cosme Furlong; Christophe Gorecki; Erik L. Novak, Editor(s)

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