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Proceedings Paper

Noise reduction in dynamic interferometry measurements
Author(s): Michael North Morris; Markar Naradikian; James Millerd
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Paper Abstract

A method for reducing the coherent noise, by a factor of two, in dynamic interferometry measurements is presented. Reducing coherent noise is particularly important in "on-machine" metrology applications where residual noise can be polished into the surface under test. Both theory and experimental measurements are discussed.

Paper Details

Date Published: 2 August 2010
PDF: 11 pages
Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900O (2 August 2010); doi: 10.1117/12.860450
Show Author Affiliations
Michael North Morris, 4D Technology Corp. (United States)
Markar Naradikian, 4D Technology Corp. (United States)
James Millerd, 4D Technology Corp. (United States)

Published in SPIE Proceedings Vol. 7790:
Interferometry XV: Techniques and Analysis
Catherine E. Towers; Joanna Schmit; Katherine Creath, Editor(s)

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