Surface metrology of MEMS requires high resolution sensors due to their fine structures. An automated multiscale measurement system with multiple sensors at multiple scales enables fast acquisition of the surface data by utilizing high resolution sensors only at locations required. We propose a technique that depends on the fact that often MEMS have features (e.g. combs) repeating across the surface. These features can be segmented and fused to generate an ideal template. We present an automated similarity search approach based on feature detection, rotation invariant matching, and sum of absolute differences to find similar structures on the specimen. Then, similar segments are fused and replaced in the original image to generate an ideal template.

Date Published: 7 September 2010
PDF: 12 pages
Proc. SPIE 7798, Applications of Digital Image Processing XXXIII, 77981W (7 September 2010); doi: 10.1117/12.860359

Published in SPIE Proceedings Vol. 7798:
Applications of Digital Image Processing XXXIII
Andrew G. Tescher, Editor(s)