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Proceedings Paper

Development of a high-speed profilometer for manufacturing inspection
Author(s): Dean M. Ljubicic; Brian Anthony
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Paper Abstract

Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry.

Paper Details

Date Published: 24 August 2010
PDF: 8 pages
Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 776705 (24 August 2010);
Show Author Affiliations
Dean M. Ljubicic, Massachusetts Institute of Technology (United States)
Brian Anthony, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 7767:
Instrumentation, Metrology, and Standards for Nanomanufacturing IV
Michael T. Postek, Editor(s)

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