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### Proceedings Paper

NEW scanning electron microscope magnification calibration reference material (RM) 8820
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Paper Abstract

Reference Material 8820 (RM 8820) is a new scanning electron microscope calibration reference material for nanotechnology and nanomanufacturingtion recently released by NIST. This standard was developed to be used primarily for X and Y scale (or magnifi cation) calibrations of scanning electron microscopes from less than 10 times magnifi cation to more than 300 000 times magnifi cation, i.e., from about 10 mm to smaller than 300 nm range instrument fi eld of view (FOV). This standard is identifi ed as RM 8820. This is a very versatile standard, and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications, some of which will be described in this publication.

Paper Details

Date Published: 3 June 2010
PDF: 11 pages
Proc. SPIE 7729, Scanning Microscopy 2010, 77290D (3 June 2010); doi: 10.1117/12.859118
Show Author Affiliations
Michael T. Postek, National Institute of Standards and Technology (United States)
András E. Vladár, National Institute of Standards and Technology (United States)
William Keery, National Institute of Standards and Technology (United States)
Michael Bishop, International SEMATECH (United States)
Benjamin Bunday, International SEMATECH (United States)
John Allgair, International SEMATECH (United States)

Published in SPIE Proceedings Vol. 7729:
Scanning Microscopy 2010
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)