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Proceedings Paper

Digital reflection holography based systems development for MEMS testing
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Paper Abstract

MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

Paper Details

Date Published: 14 May 2010
PDF: 11 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Z (14 May 2010); doi: 10.1117/12.858451
Show Author Affiliations
Vijay Raj Singh, Nanyang Technological Univ. (Singapore)
Sui Liansheng, Nanyang Technological Univ. (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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