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Proceedings Paper

Development of MEMS-based programmable slit mask for multi-object spectroscopy
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Paper Abstract

We are developing MEMS-based programmable reflective slit masks for future generation infrared multi-object spectroscopy (MOS) for space and ground-based telescopes. These devices are composed of monocrystalline silicon micromirrors of size 200 × 100 um2 which can be tilted by electrostatic actuation yielding a tilt-angle of 20°. An electromechanical clamping mechanism has been demonstrated providing uniform tilt-angle within one arc minute precision over the whole array (5 × 5 micromirrors). Slit masks of different sizes have been produced; the largest one measures 25 × 22 mm2 and is composed of 20'000 micromirrors. Thanks to the architecture and the fabrication process of these slit masks; the micromirror peak-to-valley deformation (PTV) is uniform over the device and was measured being below 10 nm for uncoated micromirror. A slit mask of size 5 × 5 micromirrors was successfully tested in cryogenic conditions at 92 K; the micromirrors were actuated before, during and after the cryogenic experiment. To achieve for the large arrays a better fabrication yield and a higher reliability, the architecture, the process flow, the assembly and the electronics are being optimized. Optical characterizations as well as experiments of the large devices are underway.

Paper Details

Date Published: 20 July 2010
PDF: 11 pages
Proc. SPIE 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation, 77394Q (20 July 2010); doi: 10.1117/12.858258
Show Author Affiliations
Michael Canonica, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Severin Waldis, Univ. de Neuchâtel (Switzerland)
Frederic Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Nico De Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 7739:
Modern Technologies in Space- and Ground-based Telescopes and Instrumentation
Eli Atad-Ettedgui; Dietrich Lemke, Editor(s)

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