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Proceedings Paper

Studies on evaluating and removing subsurface damage on the ground surface of CLEARCERAM-Z HS
Author(s): Hiroshi Akitaya; Takuya Yamashita; Norio Ohshima; Masanori Iye; Toshinori Maihara; Hitoshi Tokoro; Keisuke Takahashi
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Paper Abstract

We evaluated depth of subsurface damage on a ground surface of the ultra low expansion glass-ceramics CLEARCERAMR®-Z HS (CC-Z HS) by Ohara Inc., which is one of the candidates for material for segmented mirrors of the Thirty Meter Telescope. We made polishing spots of Magnetorheological Finishing on the ground surface of CC-Z HS and measured exposed subsurface damage features on the spot surface. We also studied on hydrofluoric acid etching of the CC-Z HS ground surface, which is expected to be an effective method to remove a subsurface damage layer compared with time-consuming polishing. We etched small ground surfaces of CC-Z HS and evaluated its uniformity.

Paper Details

Date Published: 22 July 2010
PDF: 12 pages
Proc. SPIE 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation, 77392E (22 July 2010); doi: 10.1117/12.856645
Show Author Affiliations
Hiroshi Akitaya, National Astronomical Observatory of Japan (Japan)
Takuya Yamashita, National Astronomical Observatory of Japan (Japan)
Norio Ohshima, National Astronomical Observatory of Japan (Japan)
Masanori Iye, National Astronomical Observatory of Japan (Japan)
Toshinori Maihara, Nano-Optonics Research Institute (Japan)
Hitoshi Tokoro, Nano-Optonics Research Institute (Japan)
Keisuke Takahashi, Nano-Optonics Research Institute (Japan)


Published in SPIE Proceedings Vol. 7739:
Modern Technologies in Space- and Ground-based Telescopes and Instrumentation
Eli Atad-Ettedgui; Dietrich Lemke, Editor(s)

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