Scandium oxide is an attractive candidate for the engineering of interference coatings, although not widely explored. This paper describes the ion beam sputtering of Sc₂O₃. It is shown that the structural properties of the material are affected by the deposition conditions. Laser damage in different regimes of pulsewidths is investigated. These results show that the 1-on-1 laser damage fluence, in both the thermal and deterministic regimes, varies with deposition conditions but this is not the case for S-on-1, indicating that laser-induced defects are important.

Date Published: 6 December 2010
PDF: 12 pages
Proc. SPIE 7842, Laser-Induced Damage in Optical Materials: 2010, 784202 (6 December 2010); doi: 10.1117/12.855604

Published in SPIE Proceedings Vol. 7842:
Laser-Induced Damage in Optical Materials: 2010
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editor(s)