The results of a simulation of the optical properties of a silicon Fabry-Pérot resonator (with liquid crystal filler in the cavity), operated on the shift of the interference bands in the infrared range are presented. The possibility of tuning the reflection coefficient from 0 to 0.95 (or transmission coefficient from 1 to 0.05) by changing the refractive index by 0.1 in the cavity and using the stop-bands and resonance peaks of high order is demonstrated. The prototype Fabry-Pérot resonators were fabricated by dry and wet etching of (100)Si and (110)Si. Some of the resonators were fabricated on a silicon-on-insulator platform. A superposition of transmission peaks with reflection maxima, predicted from calculations, was confirmed experimentally, using infrared microspectroscopy, with a temperature variation from 20 ^oC to 65 ^oC and an applied electric field from 0V to 10V.

Date Published: 13 May 2010
PDF: 12 pages
Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 771320 (13 May 2010); doi: 10.1117/12.855541

Published in SPIE Proceedings Vol. 7713:
Photonic Crystal Materials and Devices IX
Hernán R. Míguez; Sergei G. Romanov; Lucio Claudio Andreani; Christian Seassal, Editor(s)